Product Features
1. SS316L VAR stainless steel valve body material, suitable for ultra-high purity applications; 
2. The inner surface roughness can reach Ra 0.13 μ m (5 μ in.), which can completely clean the flow channel; 
3. By combining two LD or HD series diaphragm valves into one, the dead zone is reduced through a common flow path limit, and the degassing performance is superior; 
4. While maintaining the basic performance of the original valve, a compact piping system can be designed through similar or dissimilar combinations; 
5. Suitable flow path systems, piping configurations, and types of joints can be selected based on the piping layout; 
6. We can design and manufacture multi diaphragm valves with special specifications of triple or more; 
7. Cobalt based superalloys have high strength, corrosion resistance, and long service life; 
8. Fully enclosed valve seat design enhances anti expansion and anti pollution capabilities, and improves helium leak testing performance. At the same time, it produces very few particles and has a long service life; 
9. High cleanliness assembly and packaging are suitable for the high-purity semiconductor industry; 
10. Every product undergoes helium testing before leaving the factory.
  • Specification Parameters
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  • Installation Instructions
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