Product Features
1. There is no spring inside, and the valve seat and diaphragm are welded together; 
2. Cobalt based superalloys have high strength, corrosion resistance, and long service life; 
3. Fully enclosed valve seat design enhances anti expansion and anti pollution capabilities, and improves helium leak testing performance. At the same time, it produces very few particles and has a long service life; 
4. The inner surface roughness can reach Ra 0.13 μm (5 μin.), which can completely clean the flow channel, minimize the interception area, and maximize the flow rate; 
5. High cleanliness assembly and packaging are suitable for the high-purity semiconductor industry; 
6. Every product undergoes helium testing before leaving the factory.
  • Specification Parameters
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  • Installation Instructions
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