1. Valve body material: SS316L, SS316L VAR;
2. Metal to metal diaphragm sealing;
3. Internal electrolytic polishing, with a smoothness of up to Ra 0.13 μm (5 μin.);
4. Small internal volume;
5. Import pressure can reach: 3500PSI;
6. Maximum flow rate: SF: 800SLPM, HF: 1000SLPM, FC: 1500SLPM;
7. High cleanliness assembly and packaging are suitable for the high-purity semiconductor industry;
8. Every product undergoes helium testing before leaving the factory.