Product Features
1. Valve body material: SS316L, SS316L VAR; 
2. Metal to metal diaphragm sealing; 
3. Internal electrolytic polishing, with a smoothness of up to Ra 0.13 μm (5 μin.); 
4. Small internal volume; 
5. Import pressure can reach: 3500PSI; 
6. Maximum flow rate: SF: 800SLPM, HF: 1000SLPM, FC: 1500SLPM; 
7. High cleanliness assembly and packaging are suitable for the high-purity semiconductor industry; 
8. Every product undergoes helium testing before leaving the factory.
  • Specification Parameters
  • PDF Download
  • Installation Instructions
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